@MastersThesis{Gonçalves:2016:EsInBo,
               author = "Gon{\c{c}}alves, Rosana Alves",
                title = "Estudo da incorpora{\c{c}}{\~a}o de boro em diamante micro- e 
                         nano-cristalino por espectroscopia de fotoel{\'e}trons excitados 
                         por raios-x (XPS)",
               school = "Instituto Nacional de Pesquisas Espaciais (INPE)",
                 year = "2016",
              address = "S{\~a}o Jos{\'e} dos Campos",
                month = "2016-02-26",
             keywords = "diamante, boro, diamond, boron, XPS.",
             abstract = "Neste trabalho foram estudados os efeitos da 
                         incorpora{\c{c}}{\~a}o de CH\$_{4}\$ e Ar na 
                         incorpora{\c{c}}{\~a}o de boro em filmes de diamante micro e 
                         nano-cristalino. Neste estudo foram analisadas dois diferentes 
                         lotes de filmes de diamante, ambos crescidos sob substratos de 
                         sil{\'{\i}}cio em reator de filamento quente atrav{\'e}s do 
                         m{\'e}todo de deposi{\c{c}}{\~a}o de vapor qu{\'{\i}}mico (do 
                         ingl{\^e}s, Chemical Vapour Deposition - CVD). O lote A {\'e} 
                         constitu{\'{\i}}do por amostras com diferentes 
                         concentra{\c{c}}{\~o}es de CH\$_{4}\$ (1, 3, 5 e 7\%) 
                         enquanto o lote B {\'e} constitu{\'{\i}}do por amostras com 
                         diferentes concentra{\c{c}}{\~o}es de Ar (0, 50, 60, 70 e 
                         80\%). A caracteriza{\c{c}}{\~a}o morfol{\'o}gica e estrutural 
                         foi realizada a partir de Microscopia Eletr{\^o}nica de Varredura 
                         (MEV), Espectroscopia Raman e Difra{\c{c}}{\~a}o de Raios X. A 
                         concentra{\c{c}}{\~a}o de boro foi estudada detalhadamente a 
                         partir de medidas de Mott Schottky Plot nos filmes. A 
                         incorpora{\c{c}}{\~a}o de boro foi estimada a partir de 
                         Espectroscopia de Fotoel{\'e}trons Excitados por Raios X (XPS). 
                         Medidas de XPS foram feitas nos modos azimutal e \emph{angle 
                         resolved} (ARXPS). Os resultados mostram uma depend{\^e}ncia da 
                         concentra{\c{c}}{\~a}o de boro com a varia{\c{c}}{\~a}o 
                         angular nas medidas, indicando que o boro se encontra em 
                         regi{\~o}es mais superficiais das amostras. Os dados obtidos 
                         atrav{\'e}s dessa t{\'e}cnica indicam a redu{\c{c}}{\~a}o da 
                         quantidade de boro em filmes com alta concentra{\c{c}}{\~a}o de 
                         carbono sp\$^{2}\$ e pequeno tamanho de gr{\~a}o. Estes 
                         resultados n{\~a}o est{\~a}o de acordo com a literatura. A 
                         incorpora{\c{c}}{\~a}o de boro tem efeito mais pronunciado nas 
                         amostras com varia{\c{c}}{\~a}o da concentra{\c{c}}{\~a}o de 
                         CH\$_{4}\$. As mudan{\c{c}}as morfol{\'o}gicas e estruturais 
                         dos filmes causadas pela varia{\c{c}}{\~a}o de CH\$_{4}\$ e Ar 
                         corroboram os resultados apresentados na literatura. ABSTRACT: In 
                         this work were studied the effects of the concentration of 
                         CH\$_{4}\$ and Ar in the boron incorporation into micro- and 
                         nano-crystalline diamond films. In this study were analyzed two 
                         different lots of diamond films, both grown on silicon substrates 
                         in hot filament reactor by the method of Chemical Vapour 
                         Deposition (CVD). Lot A was composed of samples with different 
                         concentrations of CH\$_{4}\$ (1, 3, 5 and 7\%) while the lot B 
                         was constituted by samples with different concentrations Ar (0, 
                         50, 60, 70 and 80\%). The morphological and structural 
                         characterization was performed from Scanning Electron Microscopy 
                         (SEM), Raman spectroscopy and X-ray Diffraction. The boron 
                         concentration was studied in detail from of measures of Mott 
                         Schottky Plot on the films. The boron incorporation was estimated 
                         from X-ray Photoelectron Spectroscopy. XPS measurements we are 
                         carried out in azimutal and angle resolved (ARXPS) mode. The 
                         results shown a dependency of boron concentration with variation 
                         angular in the measurements, indicating that boron is in the more 
                         superficial regions of the samples. The data obtained using this 
                         technique indicate the reduction of the amount of boron in films 
                         with high concentration of sp\$^{2}\$ carbon and small grain 
                         size. This results are not in agreement with the literature. The 
                         incorporation of boron has more pronounced effect for the samples 
                         with variation of concentration of CH\$_{4}\$. The morphological 
                         and structural changes in the film caused by the variation of 
                         CH\$_{4}\$ and Ar were corroborated by the results presented in 
                         the literature.",
            committee = "Baldan, Maur{\'{\i}}cio Ribeiro (presidente/orientador) and 
                         Ferreira, Neiden{\^e}i Gomes and Matsushima, Jorge Tadao",
           copyholder = "SID/SCD",
         englishtitle = "Study of the incorporation of boron in diamond micro- and 
                         nano-crystalline by x-ray photoelectron spectroscopy (XSP)",
             language = "pt",
                pages = "143",
                  ibi = "8JMKD3MGP3W34P/3L68LDS",
                  url = "http://urlib.net/ibi/8JMKD3MGP3W34P/3L68LDS",
           targetfile = "publicacao.pdf",
        urlaccessdate = "27 abr. 2024"
}